ECE4134

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ECE 4134 Fundamentals of MEMS

Electrcl & Comptr EngineeringSchool of Egr. and Comp. Sci.
Course InfoCreditsRepeat RulesRestrictions

Course Title

Fundamentals of MEMS

Course Description

Micro-electro-mechanical Systems (MEMS) specifications, MEMS materials, materials mechanics, MEMS fabrication technologies, lumped-element method and MEMS device modeling and dynamics, energy transductions for sensing and actuations, case study on sensors and actuators. Finite element analysis (FEA) for MEMS structural design, with projects. ECE 4134 to be cross-listed with ECE 5134.Prerequisite(s): ECE 3100*Approved Slash Course. Credit can only be earned for ECE 4134 or ECE 5134.

College/School

School of Egr. and Comp. Sci.